摘 要：介绍了几种近代超精密研磨抛光方法的加工原理、特点、加工对象和应用。 关键词：超精密研磨；弹性发射加工；机械化学研磨；磁力研磨；超声研磨 Abstract：Introduces several methods of modern ultra-precision polishing processing principle, characteristics, objects and application. Key words：Ultra-precision grinding, Elastic emission machining, Chemical mechanical polishing, Magnetic abrasive, Ultrasonic grinding.